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Carbon tetrafluoride-四氟甲烷-CF4

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Name:Carbon tetrafluoride Chemical common name：四氟甲烷 Formula:CF4 Categories:Etching Class Subclasses:Etching Class Specifications:5N: Storage methods:DOT steel bottles / GB steel bottle / ISO steel bottle

Description

Description	Carbon tetrafluoride, also known as tetrafluoromethane, Freon-14, and R 14, a halogenated hydrocarbon (chemical formula: CF4). It can be regarded as a halogenated hydrocarbon, halogenated methanes, perfluorocarbons, may also be considered as an inorganic compound.
Usage	Plasma etching process for a variety of integrated circuits, but also used as a laser gas and refrigerant.
Precautions	Inhalation of carbon tetrafluoride and concentration-related consequences, including the destruction of headache, nausea, dizziness and cardiovascular system (mainly heart). Prolonged exposure can cause serious heart damage. Relatively high density of carbon tetrafluoride, can fill the floor space range, in unventilated areas can lead to suffocation.
By Industry	Semiconductors, solar energy, metal smelting and plastics industries.

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