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Tungsten hexafluoride-WF6

summary

Name:Tungsten hexafluoride Chemical common name: Formula:WF6 Categories:Deposition Subclasses:Deposition Specifications:5N: Storage methods:DOT steel bottle

Description

DescriptionTungsten hexafluoride, a colorless gas or light yellow liquid, solid as a deliquescent white crystals, smoke in the humid air. Mainly used for chemical vapor deposition of tungsten, is used as a fluorinating agent. Tungsten hexafluoride is a strong fluorinating agent, with the exception of nickel, Monel and stainless steel, can make a lot of metal fluoride at room temperature. In the dry state of corrosion of the glass is weak, but in the moisture can respond quickly. Tungsten hexafluoride and ionic halide complex compound may be formed at a high temperature can be reduced to hydrogen tungsten. Tungsten hexafluoride water quickly hydrolyzed rapidly generate hydrogen fluoride (HF) and tungsten trioxide.
UsageMainly used for chemical vapor deposition of tungsten, is used as a fluorinating agent.
PrecautionsIn case of moist air or water decomposition, distribution also highly toxic and corrosive hydrogen fluoride fumes. The goods to the eyes, skin and mucous membranes can cause serious burns.
By IndustryChemical industry

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