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Phosphine-PH3

summary

Name:Phosphine Chemical common name: Formula:PH3 Categories:Participation Miscellaneous Subclasses:Participation Miscellaneous Specifications:5N-6N: Storage methods:DOT steel bottle

Description

DescriptionPhosphine is important in semiconductor device manufacturing N-type dopant source, but also for phosphine chemical vapor deposition of polysilicon, epitaxial Ga P materials, ion implantation process, MO CVD process, phosphorus silicate glass (PSG) passivation film was prepared and other processes.
Usage
PrecautionsColorless, toxic, flammable gas with a garlic flavor annoying.

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